Téléchargez google books en pdf gratuitement en ligne Nanopositioning Technologies: Fundamentals and Applications

Nanopositioning Technologies: Fundamentals and Applications

Nanopositioning Technologies: Fundamentals and Applications

by Changhai Ru

Editeur : Springer International Publishing
ISBN: 9783319238524
Broché: 420
Télécharger les formats: pdf, ePub, mobi, fb2
Taille du fichier: 11 Mb
Date d'affichage: 2020-11-30
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La description:

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.